Silicon Pressure Sensors
Uncompensated/Compensated and Compensated Calibrated

GENERAL DESCRIPTION
The XPC/XPCL and XPX/XPXL Series sensors integrate silicon micromachined sensing technology, temperature compensation, and calibration in a complete family of low cost packages. This series offers the most cost-effective solution for design requirements.
These piezoresistive pressure sensors use micromachined silicon chips mounted on a ceramic and protected with a plastic cap. Several tube arrangements with nylon housings are available for various pressure applications.
On devices of 5 psi and above, the topside of the chip is protected against humidity by a Silgel coating. While the sensors are designed for use with noncorrosive, nonionic pressure media, they accommodate many gases that are used in medical applications.

FEATURES
• Low Cost, Small Size
• Temperature Compensated
• Zero and Span Calibrated
• Millivolt Output
• Differential, Gage and Absolute Pressure
• Constant Voltage Excitation
• High Impedance - Low Current

TYPICAL APPLICATIONS
• Medical Applications
• Applications Requiring Small Size
• Applications Requiring Vacuum and Positive
• Pressure Reference, or Both